張潔編的《晶圓制造自動化物料運輸繫統調度(英
文版)(精)》在繫統全面介紹制造繫統中的多種復雜調
度問題的基礎上，重點介紹了分別面向不同調度問題
的智能化調度方法，具體包括非等效並行機智能調度
方法、非等效並行機作業車間智能調度方法、面向多
工藝路線非等效並行機作業車間智能調度方法、非等
效並行機流水車間智能調度方法以及混流裝配線智能
調度方法。考慮到雲計算是一種實現分布式計算機群
的海量數據資源和CPU資源高效整合的協同計算方法，
本書還介紹不同調度方法的雲端化技術與實現方式，
搭建基於雲計算的制造車間智能調度及服務繫統。本
書提出的方法和技術將為廣大企業、科研院所、高等
院校進一步深入研究制造車間調度問題提供理論基礎
，為推動我國網絡化協同制造技術發展和企業實際應
用提供參考，對提升我國制造企業的核心技術競爭力
及行業綜合實力具有重要意義。

1 Semiconductor wafer fabrication system
1.1 Semiconductor Manufacturing Industry
1.1.1 Development and Current Status of the Semiconductor
Manufacturing Industry
1.1.2 Future ChaUen.es in the Semiconductor Manufacturing
Industry
1.2 Processing of Semiconductor Chips
1.2.1 Wafer Preparation
1.2.2 Wafer Fabrication
1.2 ,3 Wafer Sort
1.2.4 Chip Packaging
1.2.5 Chip Final Measurement
1.3 Constitution of the Semiconductor Wafer Fabrication System
1.3.1 Wafer Processing System
1.3.2 Material Handling System
1.4 Production Scheduling in the Semiconductor Wafer Fabrication
System
References
2 Automated material handling systems in SWFSs
2.1 Development of Material Handling Systems in SWFSs
2.1.1 Semi-automated Material Handling Systems
2.1.2 Automated Material Handling Systems
2.1.3 Intelligent Material Handling Systems
2.2 Components of the Automated Material Handling
System
2.2.1 Carriers
2.2.2 Transport System
2.2.3 Storage System
2.2.4 Tracking System
2.2.5 Control System
2.3 Layout of the Automated Material Handling System
2.3.1 Single-spine Configuration
2.3.2 Double-spine Configuration
2.3.3 Integrated Configuration
2.3.4 Perimeter Configuration
2.3.5 Mixed Configuration
2.4 Features of the Automated Material Handling System
References
3 Modeling methods of automated material
handling systems in SWFSs
3.1 Modeling Methods Based on the Network Flow
3.1.1 Basic Theory of the Network Flow Model
3.1.2 Network Flow Modeling Process for AMHSs
3.2 Modeling Methods Based on the Queuing Theory
3.2.1 Basic Theory of the Queuing Theory Model
3.2.2 Queuing Theory Modeling Process for AMHSs
3.3 Modeling Methods Based on Mathematical Programming
3.3.1 The Mathematical Programming Model
3.3.2 Mathematical Programming Modeling Process for AMHSs
3.4 Modeling Methods Based on the Markov Model